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Equipment
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JEOL JSM 6400 Scanning Microscope
‧ Acceleration voltage: 0.2~40 kv
‧ Focusable working distance: 3~53 mm
‧ Dynamic focus: 0°~40° at magnification above 20X
‧ SEI Resolution at 8 mm WD = 3.5 nm at 39 mm WD = 10.0 nm
‧ BEI Resolution (at 35kv) at 8mm WD = 10.0nm
‧ Magnification: 10x ~ 100,000x
‧ Probe current: 10^-12 ~ 10^-5
‧ EDS: elements with atomic number greater than 11
‧ EBSD spacial resolution: 0.5 μm
Affiliated:
EDS Analysis (OXFORD Link ISIS)
Electron backscattered diffraction, EBSD (OXFORD OPAL)
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