Title

Auger, ESCA

Telephone No.

4083

Location

B3025

Responsible Professor

Bae-Heng Tseng,

Participative Professor

Ker-Chang Hsieh / Liuwen Chang

Equipment

(Auger Electron Spectroscopy)
Field Emission Gun (0.5~30kV, 1x10-12~2x10-7A)
20~500,000X
SEI resolution: 3 nm (25KV,10pA)
Auger electron resolution: 8 nm (25 KV, 1 nA)
(ΔE/E):0.8%

X-ray Photoelectron Spectrometer facility)
Dual anode(Al Kα/Mg Kα)
X-ray source and power supply

Research

Technician/Student

Miss Shu-Ying Shi

Picture

Reference Link