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Heteroepitaxial Fe films on GaN(0 0 0 1) are grown at 50, 350 and 500 °C by molecular beam 

epitaxy. The structural properties of these films are studied in situ   by reflection high-energy

electron diffraction ϕ$$ scans and ex situ by electron backscatter diffraction and longitudinal as

well as azimuthal X-ray scans. Their morphological and magnetic properties are investigated

by atomic force microscopy and superconducting quantum interference device magnetometry,

respectively. Higher growth temperatures lead to a clear improvement of the structural quality

of the films while retaining their morphological integrity. Furthermore, the coercivity of the films

increases significantly with growth temperature.

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