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The size controlled Al nanoparticles (NPs) were prepared by magnetron sputtering and

subsequent rapid thermal annealing. Significant deep ultraviolet (DUV) detection

enhancement is demonstrated on 4H-SiC metal-semiconductor-metal (MSM) ultraviolet

photodiodes (PDs) by introducing the coupling of localized surface plasmon resonance

(LSPR) from Al NPs. The peak responsivity of 165 mA/W and quantum efficiency

of 93% at 220-nm wavelength are achieved under deuterium lamp illumination when

10-V bias is applied, which is 3.93 times than that without Al NPs. LSPR at wavelength

as low as 220 nm is the shortest one ever reported in Al NPs.

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